Products
Electrostatic charges can cause a variety of problems to both substrates and the production outcome. To accurately measure these charges all parts of the production process have to be moving - including the measuring instruments. Estion provides measuring systems that perform realtime in-situ measurements of electrostatic charges within fully automated production processes.
Our product development is based upon 30 years of experience and regular contact with our customers, which gives us a deep insights into their needs and problems. We enable companies to monitor and control the production process and identify problems caused by electrostatic charges with these systems:
![](https://estion-tech.com/content/2-products/coroclean_klassenraum_square.jpg)
Raumluftreiniger COROCLEAN
Das Raumluft-Reinigungssystem COROCLEAN schafft virenfreie Luft für Schulen, Kitas, Restaurants, Fitness-Studios, Kosmetik-Studios, Büros u.a.
![](https://estion-tech.com/content/2-products/estion_products_cpm_teaser.jpg)
Charged Plate Monitor/CPM
A handheld ionization monitoring device for tests in cleanroom minienvironments and other enclosed spaces.
![](https://estion-tech.com/content/2-products/estion_products_e-reticle_teaser.jpg)
E-Reticle
The E-Reticle makes in-situ-measurement of electrostatic charges on photomasks during production and use possible.
![](https://estion-tech.com/content/2-products/estion_products_e-wafer_teaser.jpg)
E-Wafer
The E-Wafer embeds measuring devices for electrostatic charges within a 200mm or 300mm wafer, which allows in-situ measurements from within the production process.
![](https://estion-tech.com/content/2-products/estion_products_e-panel_teaser.jpg)
E-Panel
The E-Panel measures electrostatic charges to flat-panel-displays under production.
![](https://estion-tech.com/content/2-products/estion_products_ionizer_teaser.jpg)
Photon Ionizer
The Photon Ionizer is a small ionizer offering fast neutralization times and is in absolute balance.
![](https://estion-tech.com/content/2-products/estion_products_euv-e-reticle_teaser.jpg)
EUV-E-Reticle (under development)
The EUV-E-Reticle helps to identify where particle attraction due to electric fields puts EUV-masks at risk.
E-Board (under development)
The E-Board is measuring electrostatic charges within circuit boards during the production or population process.
E-Tracker (under development)
The E-Tracker is our smallest measuring device yet.
![](https://estion-tech.com/content/2-products/fotoshooting-estion-175.jpg)
There is more to come…
Even though we currently have two products in development, we like to think yet another step ahead.
Our goal is to develop even more in-situ monitoring systems for the semiconductor industry (and possibly other industries, as well). In a first step, we want to integrate the technology to measure different parameters (such as temperature or chemical contamination) into our substrates. Of course, we always have a keen eye on what our customers need.
You have a special monitoring system in mind? Tell us about it!